BS IEC-63068-3-2020 pdf download

BS IEC-63068-3-2020 pdf download.Semiconductor devices — Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices Part 3: Test method for defects using photoluminescence. 4 Photoluminescence method 4.1 General Defects with characteristic PL features shall be evaluated by PL method. The following descriptions concern such defects in...