BS IEC-63068-2-2019 pdf download

BS IEC-63068-2-2019 pdf download.Semiconductor devices – Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices. 4 Optical inspection method 4.1 General Defects with surface morphological features shall be detected by optical inspection method. The following descriptions concern such defects in n/n+-type 4H-SiC homoepitaxial wafers with an...